Arc Evaporation Source and Vacuum Deposition System
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United States of America Patent
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Issued Date -
Mar 5, 2009
app pub date -
Jun 22, 2006
filing date -
Jun 22, 2006
priority date (Note) -
Abandoned
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Abstract
B) is operable to collect an evaporated material emitted from the cathode, based on a vacuum arc discharge occurring between the cathode and an anode.
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