Work Processing System and Plasma Generating Apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Mar 5, 2009
app pub date -
Jan 30, 2006
filing date -
Jan 30, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
while the work W is conveyed by the work conveyor C. It is possible both to successively plasma-process a plurality of works and to efficiently plasma-process works having large areas.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SAIAN CORPORATION | 579-1 UMEHARA WAKAYAMA-SHI WAKAYAMA 640-8550 |
International Classification(s)

- 2006 Application Filing Year
- C23C Class
- 1166 Applications Filed
- 600 Patents Issued To-Date
- 51.46 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Arai, Kiyota | Wakayama-shi, JP | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Kim, Jay Joongsoo | Los Altos, US | 12 | 397 |
# of filed Patents : 12 Total Citations : 397 | |||
Lee, Sang Hun | San Ramon , US | 218 | 1251 |
# of filed Patents : 218 Total Citations : 1251 |
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- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 16 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text
US Patent Application No: 2017/0314,127
SUSCEPTOR
Abstract
A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.
Description
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