LOWER ELECTRODE ASSEMBLY FOR PROCESSING SUBSTRATES
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United States of America Patent
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Issued Date -
Mar 5, 2009
app pub date -
Jun 23, 2008
filing date -
Sep 5, 2007
priority date (Note) -
Abandoned
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Abstract
A lower electrode assembly includes an insulator and a lower electrode material. The lower electrode material includes a peripheral portion having three level surfaces. The first level surface supports a substrate having a predetermined width and length. The second level surface has a width that corresponds to the predetermined width of the substrate plus a first increment and a length that correspond to the predetermined length of the substrate plus a second increment. The third level surface has a lower height than the second level surface. The insulator is provided horizontally on the second level surface and third level surface.
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