APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT

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United States of America Patent

SERIAL NO

12246992

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Abstract

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The invention relates to an apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices. The actuator devices each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points of the actuator devices acting directly on the optical element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT AGRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lippert, Johannes Buch Am Wald , DE 39 303
Muehlbeyer, Michael Aalen , DE 18 147

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