Antireflective Coating Composition

United States of America Patent

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Issued Date
Feb 12, 2009
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Aug 10, 2007
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Aug 10, 2007

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Abstract

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An antireflective coating composition which forms films with high n values is described.

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Patent Owner	Address
AZ ELECTRONIC MATERIALS USA CORP	70 MEISTER AVENUE SOMERVILLE NJ 08876

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Inventor Name	Address	# of filed Patents	Total Citations
Abdallah, David	Bernardsville , US	20	259
Shan, Jianhui	Pennington , US	28	331
Xiang, Zhong	Edison , US	14	132
Yin, Jian	Bridgewater , US	109	2509

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Antireflective Coating Composition

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United States of America Patent

11836980

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11836980

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