Excimer Lamp
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United States of America Patent
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Issued Date -
Feb 12, 2009
app pub date -
Mar 28, 2006
filing date -
Apr 22, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention seeks to provide an excimer lamp enhanced in the radiation output of excimer rays, the excimer lamp having at least an optical radiation window provided on the exit side of radiation of rays and a plurality of excimer discharge plates electrodes opposed to one another and having a constitution in which excimer discharge gas present in discharge spaces formed in the said opposed electrodes causes a discharge to radiate excimer rays, said excimer discharge electrodes being flat-plate electrodes, a plurality of said discharge spaces being provided, each of which is between flat-plate electrodes, said optical radiation window being provided in parallel with discharge channels of said discharge spaces.
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