Method and device for controlling and monitoring a position of a holding element
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United States of America Patent
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N/A
Issued Date -
Feb 12, 2009
app pub date -
Jun 12, 2008
filing date -
Jun 13, 2007
priority date (Note) -
Abandoned
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Abstract
A system for controlling and monitoring a position of a holding element, which is provided to hold a sample to be examined, is disclosed. The system may use a beam device, such as an electron microscope. The system provides for controlling and monitoring a position of a holding element taking into account any errors with respect to irregularities and may include interpolation of possible errors.
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