SYSTEMS AND METHODS FOR MIXING FLUIDS
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United States of America Patent
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Issued Date -
Feb 5, 2009
app pub date -
May 13, 2008
filing date -
May 14, 2007
priority date (Note) -
Abandoned
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Abstract
Methods and fluid delivery systems mix fluids together. A blender of the system receives and blends at least two chemical compounds together for delivery to one or more vessels, tanks or process tools, such as chemical baths that facilitate processing (e.g., cleaning) of semiconductor wafers or other components. A first fluid enters into a bore of a mixing chamber of the blender through an aperture in a wall of the chamber to enable blending of the first fluid with a second fluid injected into a central region of the bore.
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