APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER ION BEAM

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United States of America Patent

APP PUB NO 20090032725A1
SERIAL NO

11830346

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Abstract

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Embodiments of an apparatus and methods of forming isolated islands of modified material with a gas cluster ion beam are generally described herein. Other embodiments may be described and claimed.

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Patent Owner(s)

Patent OwnerAddress
TEL EPION INC37 MANNING ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hautala, John J Beverly, US 60 1845

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