Resin Film Forming Device, Method and Program of the Same
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United States of America Patent
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Issued Date -
Jan 29, 2009
app pub date -
Feb 5, 2007
filing date -
Feb 7, 2006
priority date (Note) -
Abandoned
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Abstract
A resin film forming device is provided which includes a spinner on which a circular disc having a hole at the center thereof is mounted, the spinner making the disc spin about the hole; a resin supply unit which applies resin around the hole of the disc; and a light irradiation unit which irradiates the resin on the disc mounted on the spinner with light to cure the resin, the light irradiation unit shifting a light irradiation position from an inner circumference side toward an outer circumference side of the disc mounted on the spinner, and stopping the light irradiation before the light irradiation unit reaches the outer circumference of the disc.
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