Electronic Device, Method of Manufacture of Same and Sputtering Target
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United States of America Patent
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Issued Date -
Jan 22, 2009
app pub date -
Feb 21, 2007
filing date -
Mar 6, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An electronic device having a first electrode including a metal oxide and a second electrode including an aluminum alloy film and manufacturing technology therefor. The second electrode is directly contacted and electrically connected to the first electrode, wherein, in the contact interface between the aluminum alloy film and said first electrode, at least a part of alloy components constituting the aluminum alloy film exist as a precipitate extending across the contact interface to contact the metal oxide to the aluminum alloy film by the precipitate. This construction enables direct contact between the aluminum alloy film and the electrode consisting of a metallic oxide and allows for elimination of a barrier metal in such an electronic device.
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