WORKPIECE LOADING SYSTEM
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United States of America Patent
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Issued Date -
Jan 22, 2009
app pub date -
Jul 16, 2007
filing date -
Jul 16, 2007
priority date (Note) -
Abandoned
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Abstract
A wafer loading system accommodates sufficient wafer carriers to substantially maximize the processing speed capability of wafer processing systems. Wafer carriers are placed into and removed from the loading system by one or two overhead carrier loading elements, such as overhead track systems. Carriers may be loaded or removed while other carriers are in work. One or more transfer robots may move wafers from the carriers to buffers. Methods of operating the loading system allow delivery and removal of wafers to and from the processing systems to meet or exceed the processing speeds of the processing systems.
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