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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
AT&T INTELLECTUAL PROPERTY I L P	754 PEACHTREE STREET SUITE 7C ATLANTA GA 30308

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Beder, Susanne	Aalen , DE	44	451
Clauss, Wilfried	Tuebingen , DE	20	108
Dodoc, Aurelian	Heidenheim , DE	105	2315
Feldmann, Heiko	Aalen , DE	77	442
Kraehmer, Daniel	Essingen , DE	59	660
Totzeck, Michael	Schwaebisch Gmuend , DE	72	826

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2009/0021,830

PROJECTION LENS OF A MICROLITHOGRAPHIC EXPOSURE SYSTEM

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