Piezoelectric device
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United States of America Patent
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N/A
Issued Date -
Jan 15, 2009
app pub date -
Mar 22, 2007
filing date -
Mar 22, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
[Object] To provide a piezoelectric device having excellent drive level characteristics in terms of downsizing, having no remaining stress at the bonding portion of the container and leaving no characteristics deteriorating factors. stacked and fixed on the framed resonator element, wherein the base substrate, the framed resonator element, and the lid are made from the same materials or the materials having highly approximate linear coefficients of expansion and the bonding surfaces thereof are bonded with each other by surface activating process so as to be vacuum-sealed.
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