Chemically amplified positive resist composition

United States of America Patent

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Feb 22, 2011
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Jan 1, 2009
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Jun 20, 2008
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Jun 22, 2007

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Abstract

A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I):

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SUMITOMO CHEMICAL COMPANY LIMITED	2-7-1 NIHONBASHI CHUO-KU TOKYO 103-6020

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Inventor Name	Address	# of filed Patents	Total Citations
Akita, Makoto	Hsin-Chu, TW	17	109
Hashimoto, Kazuhiko	Toyonaka, JP	91	1995
Yoshida, Isao	Ikeda, JP	120	2222

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Chemically amplified positive resist composition

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United States of America Patent

12143268

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PATENT NO	7893293
APP PUB NO	20090004600A1
SERIAL NO	12143268
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 22, 2011	US,7893293,B2 US7893293B2	GRANTED PATENT AS SECOND PUBLICATION
January 01, 2009	US,20090004600,A1 US20090004600A1	FIRST PUBLISHED PATENT APPLICATION

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12143268

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