Apparatus and Method for Preventing Haze Growth on a Surface of a Substrate
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United States of America Patent
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Issued Date -
Jan 1, 2009
app pub date -
Feb 12, 2007
filing date -
Feb 13, 2006
priority date (Note) -
Abandoned
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Abstract
An apparatus and method for preventing haze growth on a surface of a substrate are disclosed. The apparatus includes a container operable to store a substrate and a gas source coupled to the container. The gas source is operable to dispense a gas into the container in order to prevent a haze from growing on a surface of the substrate.
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