Apparatus for the manipulation and/or adjustment of an optical element

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United States of America Patent

SERIAL NO

12221045

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Abstract

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The invention relates to an apparatus for the manipulation and/or adjustment of an optical element with respect to a structure, the optical element being connected to the structure by means of a number of setting members, and the setting members having as active adjusting elements screw elements or piezoceramic elements, which in each case produce an active force along one degree of freedom and by means of which the optical element is connected to the structure in such a way that it can be set in up to six degrees of freedom.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT AGRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dengel, Guenther Heidenheim, DE 12 90
Melzer, Frank Utzmemmingen , DE 28 380
Stein, Volker Buseck, DE 9 76
Weiss, Markus Aalen, DE 47 490

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