METHODS AND APPARATUS FOR CLEANING DEPOSITION CHAMBER PARTS USING SELECTIVE SPRAY ETCH
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United States of America Patent
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Issued Date -
Jan 1, 2009
app pub date -
Jun 26, 2008
filing date -
Jun 28, 2007
priority date (Note) -
Abandoned
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Abstract
In one aspect, a method of cleaning an electronic device manufacturing process chamber part is provided, including a) spraying the part with an acid; b) spraying the part with DI water; and c) treating the part with potassium hydroxide. Other aspects are provided.
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