METHODS OF TREATING A SURFACE OF A FERROELECTRIC MEDIA
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United States of America Patent
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Issued Date -
Dec 25, 2008
app pub date -
Jun 19, 2007
filing date -
Jun 19, 2007
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Abandoned
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Abstract
A method of forming a passivation layer over a ferroelectric layer of a ferroelectric media comprises introducing the ferroelectric layer to a plasma comprising one of oxygen, oxygen-helium, and oxygen-nitrogen-helium, etching a surface of the ferroelectric layer, forming one of a substantially oxygen enriched layer and a substantially hydroxyl enriched layer at the surface of the ferroelectric layer, introducing the ferroelectric layer to an environment comprising substantially nitrogen, and maintaining the ferroelectric layer within the environment so that nitrogen enriches the substantially oxygen enriched layer to form a passivation layer.
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