Determining the position of a semiconductor substrate on a rotation device
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United States of America Patent
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Jun 29, 2010
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app pub date -
Aug 26, 2004
filing date -
May 21, 2004
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Abstract
A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver.
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