CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
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United States of America Patent
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N/A
Issued Date -
Dec 25, 2008
app pub date -
Aug 26, 2008
filing date -
Dec 23, 2004
priority date (Note) -
Abandoned
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Abstract
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
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