SMART PARALLEL CONTROLLER FOR SEMICONDUCTOR EXPERIMENTS
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United States of America Patent
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Issued Date -
Dec 25, 2008
app pub date -
Jun 21, 2007
filing date -
Jun 21, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An instrument is configured to coordinate execution of a plurality of experiments employing a plurality of source measurement units (SMU's) to characterize a plurality of devices under test (DUT's). Each experiment controller, of a plurality of experiment controllers, is configured to manage one of the plurality of experiments by, at least in part, controlling the SMU's allocated to that experiment. A main controller is configured to interoperate with a host to manage the experiment controllers. For example, the instrument may be configured to provide experiment parameters to the SMU's prior to execution of the experiments. In one aspect, the main controller is configured to receive experiment parameters from a host controller external to the instrument. At least in part based on the received experiment parameters, the main controller configure which experiment controllers are to manage which experiment. The main controller is also configured to cause each experiment controller to provide appropriate ones of the received experiment parameters to the SMU's allocated to the experiment which that experiment controller is configured to manage.
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