Method and Apparatus for Replicating Microstructured Optical Masks
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United States of America Patent
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Issued Date -
Dec 25, 2008
app pub date -
Sep 7, 2005
filing date -
Sep 8, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a method and an apparatus for replicating planar, thin-layered, and microstructured flat lens system and optical mask (LM) that are provided with such microstructured lens system which are hardened from a highly viscous transparent fluid on a supporting substrate plate (TP). The fluid is introduced between a plate-shaped master plate (M) and a movable supporting substrate plate and remains joined to said substrate plate after hardening. The inventive method is carried out in a non-rotational manner while the molding space is not delimited by sidewalls or similar in the direction of expansion of the fluid. The inventive flat lens systems or optical masks are embodied as lenticular arrays, field lenses, or Fresnel lenses. The final shape of the mask is homogeneous, has a geometrically accurate layer thickness, and is free from air pockets. The inventive method and apparatus allow for controlled replication at great geometrical accuracy and extremely good optical quality.
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