Slit Valve Door
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United States of America Patent
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Issued Date -
Dec 25, 2008
app pub date -
Jun 11, 2008
filing date -
Jun 25, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a slit valve for sealing an opening in a chamber, wherein the slit valve includes a door having an interior and an exterior surface. A sealing member is disposed on the interior surface of the door near a periphery of the interior surface of the door, and a portion of the interior surface extends outwardly from the door and into the chamber so as to disrupt a flow of chemicals flowing towards the sealing member from within the chamber.
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