TEMPERATURE CONTROL DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20080314564A1
SERIAL NO

12110225

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ITAFUJI, Hiroshi Komaki-shi, JP 38 374
KOBAYASHI, Yoshiyuki Nirasaki-shi, JP 444 4807
KOKUBO, Norio Komaki-shi, JP 9 28
MURAKAMI, Koichi Nirasaki-shi, JP 107 2035
NAGASEKI, Kazuya Nirasaki-shi, JP 96 3054
NONAKA, Ryo Nirasaki-shi, JP 22 647
SUDOH, Yoshihisa Komaki-shi, JP 2 60

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