Chamfering apparatus, a grinding wheel, and a chamfering method

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United States of America Patent

APP PUB NO 20080311827A1
SERIAL NO

12149553

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Abstract

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A chamfering apparatus for chamfering an outer periphery of a disk-shaped substrate includes a grinding member having a circular hole inside thereof, wherein the hole has a diameter larger than an outer diameter of the substrate. An inner periphery of the grinding member forming the hole is a grinding surface and grinds the outer periphery of the substrate.

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Patent Owner(s)

Patent OwnerAddress
FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD1-11-2 OSAKI SHINAGAWA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakajima, Norihiko Nagano, JP 13 23
Nishimaki, Shinichiro Nagano, JP 4 7
Tanaka, Yoshihiko Nagano, JP 59 625

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