VACUUM COATING INSTALLATION WITH TRANSPORT ROLLERS FOR THE TRANSPORT OF A PLANAR SUBSTRATE
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United States of America Patent
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N/A
Issued Date -
Dec 11, 2008
app pub date -
Jun 6, 2007
filing date -
Jun 6, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a vacuum coating installation with a transport system for planar substrates which are transported through a vacuum chamber. This transport system comprises several cylinders disposed in parallel. As the driving means for these cylinders one or several motors may be provided, which are located within or outside of the vacuum chamber. The coupling between the motor or the motors and the cylinders in any event takes place via magnet couplings. Since hereby no mechanical coupling established between the driving means and the cylinders, these can readily be separated from one another, which permits providing the cylinders, and with them the sputter cathodes, in a slide-in element which can be moved into and out of the vacuum chamber. If not every cylinder is provided with its own driving means, the cylinders, which are coupled with a driving means, can be connected via V-belts or the like with the other cylinders.
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