Vacuum pressure control system
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United States of America Patent
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N/A
Issued Date -
Dec 11, 2008
app pub date -
May 6, 2008
filing date -
Jun 5, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A vacuum pressure control system includes a vacuum chamber, a vacuum pump for sucking gas from the vacuum chamber, a vacuum open/close valve for controlling vacuum pressure in the vacuum chamber by changing a opening degree by driving air supplied from an air supply source serving as a power source, a vacuum pressure control device for controlling the vacuum open/close valve, and a servo valve for controlling the opening degree of the vacuum open/close valve.
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