Variable shape mirror and manufacturing method for variable shape mirror
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United States of America Patent
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Issued Date -
Nov 27, 2008
app pub date -
Aug 8, 2007
filing date -
Aug 9, 2006
priority date (Note) -
Abandoned
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Abstract
A variable shape mirror includes a support substrate provided with a conductive bonding portion that is divided into two areas bonded to a lamination type piezoelectric actuator. A bonding surface of the piezoelectric actuator is provided with a first metal film that is divided into a first area and a second area that are not connected to each other electrically. Side faces of the piezoelectric actuator are provided with a second metal film that connects a first common electrode to the first area electrically or connects a second common electrode to the second area electrically. The piezoelectric actuator is disposed on the bonding portion so that the individual areas of the first metal film are connected electrically to the different areas of the bonding portion, respectively.
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