METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM
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United States of America Patent
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Issued Date -
Nov 27, 2008
app pub date -
May 25, 2008
filing date -
May 25, 2007
priority date (Note) -
Abandoned
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Abstract
A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information.
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