PROJECTION OBJECTIVE WITH DECENTRALIZED CONTROL
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United States of America Patent
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app pub date -
Jun 19, 2008
filing date -
Dec 22, 2005
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Abandoned
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Abstract
The invention relates to an objective, such as a projection objective for semiconductor microlithography. The objective can include an optical element that is adjustable by a manipulator unit with an actuator and a sensor. The manipulator unit can be driven by a control system via a data bus. The manipulator unit can have a decentralized control subsystem arranged in the region of the manipulator unit. The control subsystem can be connected to the control system via the data bus.
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