GUN CHAMBER, CHARGED PARTICLE BEAM APPARATUS AND METHOD OF OPERATING SAME

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United States of America Patent

APP PUB NO 20080284332A1
SERIAL NO

12105546

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Abstract

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A gun chamber for a charged particle emitter is provided, said gun chamber comprising at least one electrode coated with a non-evaporable getter (NEG) material.

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBHAMMERTHALSTRASSE 20A HEIMSTETTEN D85551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ADAMEC, Pavel Haar, DE 53 1042

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