EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME
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United States of America Patent
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Issued Date -
Nov 20, 2008
app pub date -
Apr 18, 2008
filing date -
Apr 20, 2007
priority date (Note) -
Abandoned
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Abstract
An emitter chamber for a charged particle beam apparatus with a wall defining a vacuum enclosure is provided, the emitter chamber comprising a housing enclosing an emitter (and at least one pump and attachment means for attaching said emitter chamber to the wall of said charged particle apparatus so that the housing of said emitter chamber is accommodated within said vacuum enclosure.
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