OPTICAL CHARACTERISTIC MEASURING APPARATUS USING LIGHT REFLECTED FROM OBJECT TO BE MEASURED AND FOCUS ADJUSTING METHOD THEREFOR
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United States of America Patent
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Issued Date -
Nov 20, 2008
app pub date -
May 15, 2008
filing date -
May 16, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An observation light generated by an observation-purpose light source has a beam cross section where the light intensity (light quantity) is substantially uniform. A mask portion masks a part of the observation light so that the light intensity of a region corresponding to a reticle image at the beam cross section is substantially zero. The observation light including a shadow region formed corresponding to the reticle image is reflected from a beam splitter and applied to an object to be measured. Based on the contrast (difference between light and dark parts) of a reflected image corresponding to the reticle image projected on the object to be measured, the focus state of the measurement light on the object to be measured is determined.
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