Method and Device for Generating a Low-Pressure Plasma and Applications of the Low-Pressure Plasma
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United States of America Patent
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Issued Date -
Nov 13, 2008
app pub date -
Apr 1, 2005
filing date -
Apr 9, 2004
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Abandoned
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Abstract
The present invention relates to a method for generating a low-pressure plasma, in which a partial vacuum is generated by means of a vacuum pump in a low-pressure chamber, and a plasma jet is introduced at higher pressure into the low-pressure chamber. The present invention also relates to various applications of the low-pressure plasma for surface pretreatment, for surface coating, or for treating gases. The present invention also relates to a device for generating a low-pressure plasma.
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