METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIS USING LOW COHERENCE INTERFERENCE SIGNALS
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United States of America Patent
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app pub date -
Dec 4, 2007
filing date -
May 18, 2004
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Abandoned
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Abstract
Methods and related systems for determining properties of optical systems (e.g., interferometers) and/or optical elements (e.g., lenses and/or lens systems) are described. For example, information related to an optical thickness mismatch of an interferometer can be determined by providing scanning interferometry data. The data typically include obtaining one or more interference signals each corresponding to a different spatial location of a test object. A phase is determined for each of multiple frequencies of each interference signal. The information related to the optical thickness mismatch is determined based on the phase for each of the multiple frequencies of the interference signal(s).
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