ELECTRICAL CONTACT DEVICE AND ITS MANUFACTURING PROCESS
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United States of America Patent
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Issued Date -
Nov 13, 2008
app pub date -
Dec 26, 2007
filing date -
May 9, 2007
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Abandoned
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Abstract
A method of making an electrical contact device includes the step of (a) preparing a substrate, (b) forming a dielectric layer on a surface of the substrate and forming a well on the dielectric layer by means of a non-etching technique, (c) forming a first sacrifice layer in the well, (d) forming a second sacrifice layer on the dielectric layer and the first sacrifice layer and defining a probe body contour and forming a probe body metal layer in the probe body contour and then repeating this step once or several times to form a probe structure, and (e) removing the sacrifice layers to obtain the desired electrical contact device having the substrate and the probe structure.
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