Method for Changing Energy of Electron Beam in Electron Column
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United States of America Patent
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Issued Date -
Nov 13, 2008
app pub date -
Aug 18, 2006
filing date -
Aug 18, 2005
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a method of effectively changing the energy of an electron beam in an electron column for generating an electron beam. This includes the step of additionally applying voltage to an electrode such that the electron beam finally has the desired energy so as to freely control the energy when the electron beam reaches a sample.
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