Vapor deposited functional organic coatings deposited on a halogen-containing substrate

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United States of America Patent

SERIAL NO

12074497

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Abstract

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We have developed an improved vapor-phase deposition method and apparatus for the attachment of organic films/coatings containing a variety of functional groups on halogen-containing substrates. The substrate surface is halogenated using a vaporous halogen-containing compound, followed by a reaction with at least one organic molecule containing at least one nucleophilic functional group. Halogenation of the substrate surface and subsequent reaction with the organic molecule are carried out in the same process chamber in a manner such that the halogenated substrate surface does not lose its functionality prior to reaction with the nucleophilic functional group(s) on the organic molecule.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MICROSTRUCTURES INC4425 FORTRAN DRIVE SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashurst, William R Santa Cruz, CA 4 52
Chinn, Jeffrey D Foster City, CA 79 2773
Kobrin, Boris Walnut Creek, CA 77 1968
Nowak, Romuald Cupertino, CA 42 2397

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