Metallic Air-Bridges
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United States of America Patent
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Issued Date -
Oct 23, 2008
app pub date -
May 6, 2005
filing date -
May 6, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A lithographic method of producing an air-bridge (10) comprises the steps of providing a sequence of a bottom resist layer (2), a shield layer (3) and a top resist layer (4), removing the top resist layer (4) and subsequently the shield layer (3) in the area of the bridge span, removing the bottom resist layer (2) in the area of the pillars of the bridge, forming a metal layer (8) on the sequence of layers, and removing the resist layers (2, 4) together with shield layer portions (3) and metal-coated portions (9) to create the air-bridge.
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