FACILITY FOR DEPOSITING LUBRICANT COATING ON HARD MAGNETIC DISKS
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United States of America Patent
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Issued Date -
Oct 23, 2008
app pub date -
Apr 20, 2007
filing date -
Apr 20, 2007
priority date (Note) -
Abandoned
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Abstract
A facility for depositing lubricant coatings on hard magnetic disks includes load and unload vacuum locks in which cassettes carrying hard magnetic disks to be coated with a lubricant coating are turned 90.degree.. Lubricant coatings are simultaneously deposited on a plurality of hard magnetic disks in a process module. Plural cassettes carrying the hard magnetic disks are simultaneously located in the load and unload vacuum locks. Plural cassettes carrying the hard magnetic disks are simultaneously located in a buffer zone between a load vacuum lock and the module for depositing the lubricant coatings.
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