Evanescent Mode Resonator Including Tunable Capacitive Post
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United States of America Patent
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Issued Date -
Oct 16, 2008
app pub date -
Apr 13, 2007
filing date -
Apr 13, 2007
priority date (Note) -
Abandoned
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Abstract
An evanescent mode resonator including a cavity formed in a substrate of semiconductor material. The resonator includes a capacitive post positioned within the cavity, and a tuning element positioned within the wall of the cavity proximate to the capacitive post, where a gap between the flexible element and the post sets the tuning of the resonator.
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