Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel
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United States of America Patent
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Issued Date -
Oct 9, 2008
app pub date -
Sep 26, 2007
filing date -
Sep 27, 2006
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Abandoned
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Abstract
A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region.
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