SCANNING PROBE MICROSCOPE AND MEASUREMENT METHOD OF SAME
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United States of America Patent
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Issued Date -
Oct 9, 2008
app pub date -
Apr 2, 2008
filing date -
Apr 3, 2007
priority date (Note) -
Abandoned
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Abstract
A measurement method of a scanning probe microscope including a first approach operation adjusting an operation position of a fine positioning unit to near a maximum extension amount and ending the approach by coarse positioning, a first measurement operation making the probe scan the surface for measurement in a close probe state based on the first approach operation to obtain relief information of the sample surface, a positioning operation positioning the probe at a recessed part based on the relief information obtained by the first measurement operation, a second approach operation making the probe again approach the surface at a position determined by the positioning operation, adjusting an operation position of the Z-axis fine positioning device to close to a maximum extension amount, and ending the repeated approach, and a second measurement operation making the probe scan the surface for measurement in a close probe state based on the second approach operation to obtain relief information of the sample surface.
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