Methods and Apparatus for Providing a High Purity Acetylene Product

United States of America Patent

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Issued Date
Oct 2, 2008
app pub date
Nov 19, 2007
filing date
Mar 29, 2007

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Abstract

Methods and apparatus for the purification and distribution of acetylene. Acetylene is removed from an acetylene storage device, and provided to a purifier where solvent is removed. The purified acetylene is then provided to a semiconductor processing tool.

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Patent Owner	Address
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE	75007 PARIS

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Inventor Name	Address	# of filed Patents	Total Citations
Agrawal, Rajat	Newark, DE	37	687
Delcorso, Fabrice	Saclay, FR	5	31
Letessier, Olivier	San Jose, CA	7	48
McAndrew, James JF	Glen Mills, PA	16	83
Udischas, Richard J	Newark, DE	15	134
Zils, Regis	Thionville, FR	4	533

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Methods and Apparatus for Providing a High Purity Acetylene Product

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11942361

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11942361

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