Structure for Connecting End Parts and Vacuum System Using the Structure
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United States of America Patent
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Issued Date -
Sep 18, 2008
app pub date -
Dec 14, 2005
filing date -
Dec 20, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided are a structure for connecting end parts capable of, with simple equipment, reducing vibration, isolating electrical noise, and obtaining a degree of freedom for an installation position, and a vacuum system using the structure. A flange salient (202) has a recess (206) opening upwardly with a rectangle cross section and formed annularly around an inlet port (101). An O-ring (207) is provided within the recess (206). The O-ring (207) upwardly protrudes from the recess (206). Through holes (209) through which bolts (205) are penetrated are formed annularly in a plurality of places around a pump flange (201). Cylindrical elastic members (211) made of rubber are provided in the through holes (209). Further, inserted into each cylindrical elastic member (211) is a spacer collar (213) having a body (213a) in a cylindrical shape and a discal brim (213b).
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