IN SITU OPTICAL SURFACE TEMPERATURE MEASURING TECHNIQUES AND DEVICES
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United States of America Patent
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app pub date -
May 9, 2008
filing date -
Apr 20, 2001
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Abandoned
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Abstract
A vacuum processing chamber for measuring the temperature of a surface of an object comprising a cap is provided. The cap has a non-deformable end wall of thermally conducting material and a side wall connected thereto. An outside surface of the end wall is shaped to conform to a shape of the object surface to be measured. A surface on an inside of the end wall of the cap emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap end wall. The vacuum processing chamber further comprises a light wave guide having one end held within the cap a distance from the radiation emitting element and in optical communication therewith.
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