ARRANGEMENT FOR MOVING A CARRIER IN A CHAMBER, IN PARTICULAR A VACUUM CHAMBER
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United States of America Patent
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Issued Date -
Sep 18, 2008
app pub date -
Feb 28, 2008
filing date -
Mar 13, 2007
priority date (Note) -
Abandoned
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Abstract
An arrangement for moving a carrier within a vacuum chamber is described. This carrier is formed in the shape of a plate and is supported with its narrow-side lower edge on rollers driven by a drive system. As a drive system uses a magnetic coupling which is disposed partially within the vacuum chamber and partially outside of the vacuum chamber. With the aid of a force acting in the vertical direction the two components of the magnetic coupling can be displaced relative to one another. In addition, horizontal displacement of the carrier is also possible.
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