IMPRINT DEVICE, STAMPER AND PATTERN TRANSFER METHOD
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United States of America Patent
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Issued Date -
Sep 18, 2008
app pub date -
Jan 25, 2008
filing date -
Mar 12, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An imprint device transfers a micropattern created on a stamper onto a material to be transferred, by bringing the stamper and the material to be transferred in contact with each other and separating the stamper from the material to be transferred. The stamper has a recessed part on a portion of an outer circumferential part thereof around a surface with the micropattern. An outer diameter of the stamper is larger than that of the material to be transferred. The outer diameter of the material to be transferred is larger than that of the surface with the micropattern.
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