Method for the Regeneration of a Worn Quartz Glass Jig
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United States of America Patent
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Issued Date -
Sep 11, 2008
app pub date -
Apr 27, 2006
filing date -
Apr 28, 2005
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Abandoned
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Abstract
To provide a technique with which a quartz glass jig and a doped quartz glass jig are regenerated by completely removing the impurities which are attached to the surface and the impurities which have diffused into the interior from quartz glass jigs which have been used in semiconductor production processes and then carrying out working repair and removing the contamination from the working processes as well. After use, the impurities are removed from the aforementioned quartz glass jigs in the said purification treatment process which includes a purification treatment process in which the quartz glass jigs are subjected to a purification treatment in a gaseous atmosphere which includes a halogen element at a temperature within the region above a prescribed temperature.
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